scatterometry

Term
Metadata

scatterometry

Broader Terms

BT↑ [METHODS AND TECHNIQUES]

More specific terms

NT5 ↓ optical scatterometry

Related terms

RT⇆ scatterometer

Italiano scatterometria

Date of creation

11-Nov-2014

Accepted term

11-Nov-2014

Descendant terms

1

ARK

ark:/99152/t3pz87gzwrl0ed

More specific terms

1

Alternative terms

0

Related terms

1

Notes

0

Metadata

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